The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 03, 2018

Filed:

Jun. 13, 2014
Applicant:

Intel Corporation, Santa Clara, CA (US);

Inventors:

Kimin Jun, Hillsboro, OR (US);

Sansaptak Dasgupta, Hillsboro, OR (US);

Alejandro X. Levander, Santa Clara, CA (US);

Patrick Morrow, Portland, OR (US);

Assignee:

Intel Corporation, Santa Clara, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/15 (2006.01); H01L 31/0256 (2006.01); H01L 29/778 (2006.01); H01L 29/20 (2006.01); H01L 21/02 (2006.01); H01L 21/78 (2006.01); H01L 29/04 (2006.01); H01L 29/205 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7787 (2013.01); H01L 21/0254 (2013.01); H01L 21/02609 (2013.01); H01L 21/7806 (2013.01); H01L 29/045 (2013.01); H01L 29/2003 (2013.01); H01L 29/205 (2013.01); H01L 29/66462 (2013.01); H01L 29/7781 (2013.01);
Abstract

A method including forming a barrier layer on a polar compound semiconductor layer on a sacrificial substrate; coupling the sacrificial substrate to a carrier substrate to form a composite structure wherein the barrier layer is disposed between the polar compound semiconductor layer and the carrier substrate; separating the sacrificial substrate from the composite structure to expose the polar compound semiconductor layer; and forming at least one circuit device. An apparatus including a barrier layer on a substrate; a transistor device on the barrier layer; and a polar compound semiconductor layer disposed between the barrier layer and the transistor device, the polar compound semiconductor layer including a two-dimensional electron gas therein.


Find Patent Forward Citations

Loading…