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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9934988 B1

PDFFull Text
Date of Patent:
Apr. 03, 2018

Filed:

Dec. 14, 2016

Method for processing a silicon wafer

Applicant:

Infineon Technologies Ag, Neubiberg, DE;

Inventors:

Werner Schustereder, Villach, AT;

Helmut Oefner, Zorneding, DE;

Hans-Joachim Schulze, Taufkirchen, DE;

Sandeep Walia, Villach, AT;

Assignee:

Infineon Technologies AG, Neubiberg, DE;

Attorney:

Murphy, Bilak & Homiller, PLLC

Primary Examiner:

Karen Kusumakar

Int. Cl.
CPC ...
H01L 21/322 (2006.01); H01L 21/02 (2006.01); H01L 21/223 (2006.01); H01L 21/306 (2006.01); H01L 21/265 (2006.01);
U.S. Cl.
CPC ...
H01L 21/3225 (2013.01); H01L 21/02532 (2013.01); H01L 21/02592 (2013.01); H01L 21/02598 (2013.01); H01L 21/2236 (2013.01); H01L 21/26506 (2013.01); H01L 21/30604 (2013.01);
Abstract

Disclosed is a method for processing a semiconductor wafer. The method includes forming an oxygen containing region in the semiconductor wafer, wherein forming the oxygen containing region includes introducing oxygen via a first surface into the semiconductor wafer. The method further includes creating vacancies at least in the oxygen containing region and annealing at least the oxygen containing region in an annealing process so as to form oxygen precipitates.

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Schustereder, Werner. (2018). Method for processing a silicon wafer (U.S. Patent No. 9934988). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9934988

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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