The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 03, 2018

Filed:

Mar. 12, 2015
Applicant:

Fei Company, Hillsboro, OR (US);

Inventors:

N. William Parker, Hillsboro, OR (US);

Mark W. Utlaut, Scappoose, OR (US);

Laurens Franz Taemsz Kwakman, St. Ismier, FR;

Thomas G. Miller, Portland, OR (US);

Assignee:

FEI Company, Hillsboro, OR (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01J 35/08 (2006.01); G01N 23/04 (2018.01); G21K 7/00 (2006.01); H01J 35/14 (2006.01);
U.S. Cl.
CPC ...
H01J 35/08 (2013.01); G01N 23/046 (2013.01); G21K 7/00 (2013.01); G01N 2223/204 (2013.01); G01N 2223/419 (2013.01); H01J 35/14 (2013.01); H01J 2235/081 (2013.01); H01J 2235/086 (2013.01);
Abstract

An x-ray target, a method of using the x-ray target, and a computer program product with instructions for carrying out a method of using the x-ray target. The x-ray target includes a substrate made from a soft x-ray producing material and a high aspect ratio structure made from a hard x-ray producing material. The hard x-ray producing material is embedded in the substrate, formed on the substrate, cantilevered out from the edge of the substrate, or any combination thereof. The high aspect ratio structure comprises a plurality of high aspect ratio structures arranged in one or more grids or arrays, and the high aspect ratio structures in one of the one or more grids or arrays are arranged to form a Hadamard matrix structure.


Find Patent Forward Citations

Loading…