The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 27, 2018
Filed:
Dec. 02, 2014
Asml Netherlands B.v., Veldhoven, NL;
Sven Antoin Johan Hol, Veldhoven, NL;
Andrea Lodovico Mancuso, Veldhoven, NL;
Hendricus Johannes Maria Meijer, Veldhoven, NL;
Erik Maria Rekkers, Veldhoven, NL;
Marinus Johannes Maria Van Dam, Veldhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
An actuator to displace, for example a mirror, provides movement with at least two degrees of freedom by varying the currents in two electromagnets (). A moving part includes a permanent magnet () with a magnetic face constrained to move over a working area lying substantially in a first plane perpendicular to a direction of magnetization of the magnet. The electromagnets have pole faces lying substantially in a second plane closely parallel to the first plane, each pole face substantially filling a quadrant of the area traversed by the face of the moving magnet. A ferromagnetic shield () is provided around the moving part and has at least one interruption () to reduce the influence of adjacent actuators or stray fields while also minimizing attraction between the permanent magnet () and the shield ().