The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 20, 2018

Filed:

Feb. 06, 2015
Applicant:

Aselta Nanographics, Grenoble, FR;

Inventors:

Charles Tiphine, Echirolles, FR;

Thomas Quaglio, Grenoble, FR;

Luc Martin, Saint Martin le Vinoux, FR;

Assignee:

ASELTA NANOGRAPHICS, Grenoble, FR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06F 17/50 (2006.01); H01J 37/302 (2006.01); H01J 37/317 (2006.01); B82Y 10/00 (2011.01); B82Y 40/00 (2011.01);
U.S. Cl.
CPC ...
G06F 17/5081 (2013.01); B82Y 10/00 (2013.01); B82Y 40/00 (2013.01); G06F 17/50 (2013.01); H01J 37/3026 (2013.01); H01J 37/3174 (2013.01); H01J 2237/31764 (2013.01); H01J 2237/31776 (2013.01);
Abstract

The invention discloses a computer implemented method of fracturing a surface into elementary features wherein the desired pattern has a rectilinear or curvilinear form. Depending upon the desired pattern, a first fracturing will be performed of a non-overlapping or an overlapping type. If the desired pattern is resolution critical, it will be advantageous to perform a second fracturing step using eRIFs. These eRIFs will be positioned either on the edges or on the medial axis or skeleton of the desired pattern. The invention further discloses method steps to define the position and shape of the elementary features used for the first and second fracturing steps.


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