The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 13, 2018

Filed:

Jun. 06, 2016
Applicant:

Techinsights Inc., Ottawa, Ontario, CA;

Inventors:

Christopher Pawlowicz, Ottawa, CA;

Alexander Sorkin, Nepean, CA;

Michael W. Phaneuf, Ottawa, CA;

Alexander Krechmer, Ottawa, CA;

Ken G. Lagarec, Ottawa, CA;

Assignee:

TECHINSIGHTS INC., Kanata, Ontario, CA;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G21G 5/00 (2006.01); G01N 23/225 (2018.01); H01J 37/22 (2006.01); H01L 21/66 (2006.01); G01R 31/303 (2006.01);
U.S. Cl.
CPC ...
G01N 23/2255 (2013.01); H01J 37/222 (2013.01); H01L 22/12 (2013.01); G01R 31/303 (2013.01); H01J 2237/24564 (2013.01); H01J 2237/24585 (2013.01); H01J 2237/2803 (2013.01); H01J 2237/2809 (2013.01); H01J 2237/31749 (2013.01);
Abstract

Methods and systems for tracing circuitry on integrated circuits using focused ion beam based imaging techniques. A first component or node on an integrated circuit is coupled to a second component or node on the same integrated circuit. After an external bias is applied to the first component or node, a focused ion beam is applied to the integrated circuit and an image is taken using an electron detector. The features or components on the integrated circuit which are coupled to the second component or node will show up in high contrast on the resulting image. The method may also involve applying a bias to a node or component and then using focused ion beam imaging techniques (through an electron detector) to arrive at an image of the integrated circuit. Components coupled to the node will appear in high contrast in the resulting image.


Find Patent Forward Citations

Loading…