The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 06, 2018
Filed:
Aug. 08, 2007
Claude L. Bertin, Venice, FL (US);
Thomas Rueckes, Rockport, MA (US);
X. M. Henry Huang, Cupertino, CA (US);
Ramesh Sivarajan, Shrewsbury, MA (US);
Eliodor G. Ghenciu, King of Prussia, PA (US);
Steven L. Konsek, Lund, SE;
Mitchell Meinhold, Medford, MA (US);
Jonathan W. Ward, Fairfax, VA (US);
Darren K. Brock, Woburn, MA (US);
Claude L. Bertin, Venice, FL (US);
Thomas Rueckes, Rockport, MA (US);
X. M. Henry Huang, Cupertino, CA (US);
Ramesh Sivarajan, Shrewsbury, MA (US);
Eliodor G. Ghenciu, King of Prussia, PA (US);
Steven L. Konsek, Lund, SE;
Mitchell Meinhold, Medford, MA (US);
Jonathan W. Ward, Fairfax, VA (US);
Darren K. Brock, Woburn, MA (US);
Nantero, Inc., Woburn, MA (US);
Abstract
Under one aspect, a method of making a nanotube switch includes: providing a substrate having a first conductive terminal; depositing a multilayer nanotube fabric over the first conductive terminal; and depositing a second conductive terminal over the multilayer nanotube fabric, the nanotube fabric having a thickness, density, and composition selected to prevent direct physical and electrical contact between the first and second conductive terminals. In some embodiments, the first and second conductive terminals and the multilayer nanotube fabric are lithographically patterned so as to each have substantially the same lateral dimensions, e.g., to each have a substantially circular or rectangular lateral shape. In some embodiments, the multilayer nanotube fabric has a thickness from 10 nm to 200 nm, e.g., 10 nm to 50 nm. The structure may include an addressable diode provided under the first conductive terminal or deposited over the second terminal.