The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 06, 2018

Filed:

Jul. 27, 2017
Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

Inventors:

Alexander Kalnitsky, San Francisco, CA (US);

Yi-Shao Liu, Hsinchu County, TW;

Kai-Chih Liang, Hsinchu County, TW;

Chia-Hua Chu, Hsinchu County, TW;

Chun-Ren Cheng, Hsin-Chu, TW;

Chun-Wen Cheng, Hsinchu County, TW;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 51/05 (2006.01); G01N 27/414 (2006.01); H01L 27/12 (2006.01); H01L 21/84 (2006.01); H01L 51/00 (2006.01);
U.S. Cl.
CPC ...
G01N 27/4145 (2013.01); G01N 27/414 (2013.01); G01N 27/4148 (2013.01); H01L 21/84 (2013.01); H01L 27/1203 (2013.01); H01L 51/0093 (2013.01);
Abstract

The present disclosure provides a bio-field effect transistor (BioFET) and a method of fabricating a BioFET device. The method includes forming a BioFET using one or more process steps compatible with or typical to a complementary metal-oxide-semiconductor (CMOS) process. The BioFET device may include a substrate; a gate structure disposed on a first surface of the substrate and an interface layer formed on the second surface of the substrate. The interface layer may allow for a receptor to be placed on the interface layer to detect the presence of a biomolecule or bio-entity.


Find Patent Forward Citations

Loading…