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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9909212 B1

PDFFull Text
Date of Patent:
Mar. 06, 2018

Filed:

Aug. 22, 2011

Apparatus for processing substrate surface

Applicants:

Tapani Alasaarela, Helsinki, FI;

Pekka Soininen, Helsinki, FI;

Inventors:

Tapani Alasaarela, Helsinki, FI;

Pekka Soininen, Helsinki, FI;

Assignee:

BENEQ OY, Vantaa, FI;

Attorneys:

Robert P. Michal, Esq.

Carter, DeLuca, Farrell & Schmidt, LLP

Primary Examiner:

Karla A Moore

Assistant Examiner:

Tiffany Z Nuckols

Int. Cl.
CPC ...
C23C 16/00 (2006.01); C23C 16/50 (2006.01); C23F 1/00 (2006.01); H01L 21/306 (2006.01); C23C 16/455 (2006.01); C23C 16/458 (2006.01); C23C 16/54 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45544 (2013.01); C23C 16/458 (2013.01); C23C 16/545 (2013.01);
Abstract

Disclosed is an apparatus for processing a surface of a substrate by subjecting the surface of a substrate to successive surface reactions of at least a first precursor and a second precursor. The apparatus includes at least one nozzle head having two or more two or more precursor zones for subjecting the surface of the substrate to at least the first and second precursors and a moving mechanism for moving the nozzle head in oscillating movement between a first end position and a second end position. The moving mechanism is arranged to store at least part of the kinetic energy of the nozzle head released in oscillating movement of the nozzle head.

Find Patent Forward Citations

Alasaarela, Tapani. (2018). Apparatus for processing substrate surface (U.S. Patent No. 9909212). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9909212

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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