The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 20, 2018

Filed:

May. 05, 2014
Applicants:

Weize Chen, Phoenix, AZ (US);

Xin Lin, Phoenix, AZ (US);

Patrice M. Parris, Phoenix, AZ (US);

Inventors:

Weize Chen, Phoenix, AZ (US);

Xin Lin, Phoenix, AZ (US);

Patrice M. Parris, Phoenix, AZ (US);

Assignee:

NXP USA, INC., Austin, TX (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/66 (2006.01); H01L 29/872 (2006.01); H01L 29/10 (2006.01); H01L 27/06 (2006.01); H01L 29/06 (2006.01); H01L 29/08 (2006.01);
U.S. Cl.
CPC ...
H01L 29/66893 (2013.01); H01L 27/0629 (2013.01); H01L 29/107 (2013.01); H01L 29/1066 (2013.01); H01L 29/66143 (2013.01); H01L 29/872 (2013.01); H01L 29/0619 (2013.01); H01L 29/0623 (2013.01); H01L 29/0653 (2013.01); H01L 29/0692 (2013.01); H01L 29/08 (2013.01);
Abstract

A method of fabricating a Schottky diode having an integrated junction field-effect transistor (JFET) device includes forming a conduction path region in a semiconductor substrate along a conduction path of the Schottky diode. The conduction path region has a first conductivity type. A lateral boundary of an active area of the Schottky diode is defined by forming a well of a device isolating structure in the semiconductor substrate having a second conductivity type. An implant of dopant of the second conductivity type is conducted to form a buried JFET gate region in the semiconductor substrate under the conduction path region. The implant is configured to further form the device isolating structure in which the Schottky diode is disposed.


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