The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 13, 2018

Filed:

Aug. 15, 2014
Applicants:

Philip H. Bowles, San Diego, CA (US);

Stephen R. Hooper, Mesa, AZ (US);

Inventors:

Philip H. Bowles, San Diego, CA (US);

Stephen R. Hooper, Mesa, AZ (US);

Assignee:

NXP USA, Inc., Austin, TX (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P 15/18 (2013.01); B81B 7/00 (2006.01); B81C 3/00 (2006.01); G01P 15/08 (2006.01); G01C 19/5783 (2012.01);
U.S. Cl.
CPC ...
G01P 15/18 (2013.01); B81B 7/0074 (2013.01); B81C 3/001 (2013.01); G01C 19/5783 (2013.01); G01P 15/0802 (2013.01); B81B 2201/0235 (2013.01); B81B 2201/0242 (2013.01); B81B 2203/0315 (2013.01); B81B 2203/051 (2013.01); B81B 2203/053 (2013.01); B81C 2203/0109 (2013.01); B81C 2203/0118 (2013.01);
Abstract

Methods for fabricating microelectronic packages and microelectronic packages having split gyroscope structures are provided. In one embodiment, the microelectronic package includes a first Microelectromechanical Systems (MEMS) die having a first MEMS gyroscope structure thereon. The microelectronic package further includes a second MEMS die, which has a second MEMS gyroscope structure thereon and which is positioned in a stacked relationship with the first MEMS die. The first and second MEMS gyroscope structures overlap as taken along a first axis orthogonal to a principal axis of the first MEMS die.


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