The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 13, 2018

Filed:

Jan. 14, 2015
Applicant:

Tokyo Ohka Kogyo Co., Ltd., Kawasaki-shi, JP;

Inventors:

Miki Shinomiya, Kawasaki, JP;

Tomoyuki Hirano, Kawasaki, JP;

Kotaro Endo, Kawasaki, JP;

Yuta Iwasawa, Kawasaki, JP;

Assignee:

TOKYO OHKA KOGYO CO., LTD., Kawasaki-Shi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/039 (2006.01); G03F 7/20 (2006.01); C08F 224/00 (2006.01); C08F 228/06 (2006.01);
U.S. Cl.
CPC ...
C08F 224/00 (2013.01); C08F 228/06 (2013.01); G03F 7/0397 (2013.01); G03F 7/2041 (2013.01);
Abstract

A polymeric compound including a structural unit (a0) represented by general formula (a0-1) shown below and a polycyclic group-containing structural unit (a2m) other than the structural unit (a0), the structural unit (a2m) containing a lactone-containing polycyclic group, a —SO-containing polycyclic group or a carbonate-containing polycyclic group, and a resist composition including the same: wherein Rrepresents a hydrocarbon group of 1 to 6 carbon atoms which may have a substituent, or a hydrogen atom; Yarepresents a single bond or a divalent linking group; L represents an ester bond; and Rarepresents a polycyclic group having a bridged ring polycyclic skeleton or a condensed ring polycyclic skeleton, which has in its skeleton —C(═O)O— or —SO—, and at least one of an alkyl group, an alkoxy group, a halogen atom and a halogenated alkyl group.


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