The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 06, 2018
Filed:
Jul. 11, 2016
Kla-tencor Corporation, Milpitas, CA (US);
Ilya Bezel, Mountain View, CA (US);
Anatoly Shchemelinin, Bozeman, MT (US);
Matthew Derstine, Los Gatos, CA (US);
Kenneth P. Gross, San Carlos, CA (US);
David W. Shortt, Los Gatos, CA (US);
Wei Zhao, Sunnyvale, CA (US);
Anant Chimmalgi, San Jose, CA (US);
Jincheng Wang, San Jose, CA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
A system for controlling convective flow in a light-sustained plasma includes an illumination source configured to generate illumination, a bulb-less gas containment structure, and a collector element arranged to focus illumination from the illumination source into the volume of gas in order to generate a plasma within the volume of gas contained within the bulb-less gas containment structure. Further, the plasma is generated within a concave region of the collector element, where the collector element includes an opening through the collector element for propagating a portion of a plume of the plasma from a first region of the bulb-less gas containment structure to a second region of the bulb-less gas containment structure, wherein the first region of the bulb-less gas containment structure and the second region of the bulb-less gas containment structure are at least partially separated by a surface of the collector element.