The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 16, 2018
Filed:
Apr. 26, 2017
Applicant:
Nuflare Technology, Inc., Yokohama-shi, JP;
Inventor:
Nobutaka Kikuiri, Koganei, JP;
Assignee:
NuFlare Technology, Inc., Yokohama-shi, JP;
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/00 (2006.01); G01N 23/225 (2006.01); G01B 15/00 (2006.01);
U.S. Cl.
CPC ...
G01N 23/2251 (2013.01); G01B 15/00 (2013.01); G01N 2223/6116 (2013.01);
Abstract
A pattern inspection apparatus includes a column to scan a substrate on which a pattern is formed, using multi-beams composed of a plurality of electron beams, a stage to mount the substrate thereon and to be movable, a detector to detect secondary electrons emitted from the substrate because the substrate is irradiated with the multi-beams, and a drive mechanism to move the detector in order to follow movement of the stage.