The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 09, 2018
Filed:
Jan. 26, 2017
Globalfoundries Inc., Grand Cayman, KY;
Qiang Fang, Ballston Lake, NY (US);
Haigou Huang, Rexford, NY (US);
Stan Tsai, Clifton Park, NY (US);
John H. Zhang, Altamont, NY (US);
Xingzhao Shi, Clifton Park, NY (US);
Tai Fong Chao, Halfmoon, NY (US);
GLOBALFOUNDRIES INC., Grang Cayman, KY;
Abstract
A process for forming a conductive structure includes the formation of a self-aligned, inlaid conductive cap over a cobalt-based contact. The inlaid conductive cap is formed using a damascene process by depositing a conductive layer comprising tungsten or copper over a recessed cobalt-based contact, followed by a CMP step to remove excess portions of the conductive layer. The conductive cap can cooperate with a liner/barrier layer to form an effective barrier to cobalt migration and oxidation.