The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 09, 2018
Filed:
Apr. 12, 2017
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Haico Victor Kok, Veldhoven, NL;
Robbert Jan Voogd, Neerpelt, BE;
Assignee:
ASML NETHERLANDS B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); G01B 11/06 (2006.01); G01B 11/14 (2006.01); G03F 9/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70775 (2013.01); G01B 11/0675 (2013.01); G01B 11/14 (2013.01); G03F 7/70525 (2013.01); G03F 9/7046 (2013.01); G03F 9/7049 (2013.01); G03F 9/7092 (2013.01);
Abstract
A sensor system to measure a physical quantity, the system including a parallel detection arrangement with multiple detectors to allow measurements in parallel at different spatial locations, wherein the multiple detectors share a noise source, wherein the sensor system is configured such that the multiple detectors each output a signal as a function of the physical quantity, and wherein the sensor system is configured such that at least one detector responds differently to noise originating from the shared noise source than the one or more other detectors.