The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 02, 2018
Filed:
Nov. 30, 2016
Hitachi High-technologies Corporation, Minato-ku, Tokyo, JP;
Wen Li, Tokyo, JP;
Kazuki Ikeda, Tokyo, JP;
Takuma Nishimoto, Tokyo, JP;
Hiroyuki Takahashi, Tokyo, JP;
Hajime Kawano, Tokyo, JP;
HITACHI HIGH-TECHNOLOGIES CORPORATION, Tokyo, JP;
Abstract
In an image forming method of charged particle beam apparatus for scanning a sample by irradiating the sample with a converged charged particle beam and detecting secondary charged particles generated from the sample by a detection unit, receiving and processing an output signal from the detection unit, and receiving the processed signal and forming an image of the sample, receiving and processing the output signal are performed by analogically processing the output signal and by performing pulse-count processing on the output signal, and pulse-count processing is performed by removing a ringing pulse in the output signal and counting pulses in the signal from which the ringing pulse has been removed.