The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 26, 2017
Filed:
Mar. 31, 2012
Robert David Allen, San Jose, CA (US);
Phillip Joe Brock, Sunnyvale, CA (US);
Masaki Fujiwara, Tokyo, JP;
Kazuhiko Maeda, Tokyo, JP;
Hoa D. Truong, San Jose, CA (US);
Robert David Allen, San Jose, CA (US);
Phillip Joe Brock, Sunnyvale, CA (US);
Masaki Fujiwara, Tokyo, JP;
Kazuhiko Maeda, Tokyo, JP;
Hoa D. Truong, San Jose, CA (US);
International Business Machines Corporation, Armonk, NY (US);
Central Glass Co., Ltd., Ube-shi, Yamaguchi, JP;
Abstract
A photoacid generating polymer (PAG polymer) comprises i) a first repeat unit of capable of reacting with a photogenerated acid to form a carboxylic acid containing repeat unit, ii) a second repeat unit of capable of forming the photogenerated acid, and iii) a third repeat unit comprising a norbornyl ester, wherein a norbornyl ring of the norbornyl ester comprises a monovalent substituent having the formula *-L'-C(CF)(OH). L′ is a divalent linking group comprising at least one carbon and the starred bond of L′ is linked to the norbornyl ring. The first repeat unit, second repeat unit, and the third repeat unit are covalently bound repeat units of the PAG polymer.