The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 26, 2017
Filed:
Jul. 14, 2016
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Stefan Krone, Aalen, DE;
Lars Berger, Aalen Unterkochen, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/54 (2006.01); G02B 26/08 (2006.01); G03F 7/20 (2006.01); G02B 7/182 (2006.01); G02B 27/00 (2006.01);
U.S. Cl.
CPC ...
G02B 26/0816 (2013.01); G02B 7/1828 (2013.01); G02B 27/0012 (2013.01); G03F 7/702 (2013.01); G03F 7/70075 (2013.01); G03F 7/70116 (2013.01);
Abstract
A method for displacing an optical component is disclosed, in which the electrical power maximally required when displacing the component is less than the sum of the maximum electrical powers of the at least two actuators used for the displacement.