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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9847398 B1

PDFFull Text
Date of Patent:
Dec. 19, 2017

Filed:

Jul. 13, 2016

Semiconductor device with gate structure having dielectric layer on one side and contact plug on the other side

Applicant:

United Microelectronics Corp., Hsin-Chu, TW;

Inventors:

Yu-Hsiang Hung, Tainan, TW;

Chih-Kai Hsu, Tainan, TW;

Ssu-I Fu, Kaohsiung, TW;

Wei-Chi Cheng, Kaohsiung, TW;

Jyh-Shyang Jenq, Pingtung County, TW;

Assignee:

UNITED MICROELECTRONICS CORP., Hsin-Chu, TW;

Attorney:

Winston Hsu

Primary Examiner:

Nathan W Ha

Int. Cl.
CPC ...
H01L 29/423 (2006.01); H01L 23/528 (2006.01); H01L 21/768 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
H01L 29/42364 (2013.01); H01L 21/76832 (2013.01); H01L 21/76897 (2013.01); H01L 23/5283 (2013.01); H01L 29/66545 (2013.01);
Abstract

A semiconductor device is disclosed. The semiconductor device includes: a substrate; a gate structure on the substrate; a spacer around the gate structure; a contact etch stop layer (CESL) on the spacer; an interlayer dielectric (ILD) layer adjacent to one side of the gate structure and contacting the CESL; and a contact plug adjacent to another side of the gate structure and contacting the CESL.

Find Patent Forward Citations

Hung, Yu-Hsiang. (2017). Semiconductor device with gate structure having dielectric layer on one side and contact plug on the other side (U.S. Patent No. 9847398). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9847398

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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