The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 19, 2017

Filed:

Jun. 15, 2016
Applicant:

Freescale Semiconductor, Inc., Austin, TX (US);

Inventors:

Cheong Min Hong, Austin, TX (US);

Konstantin V. Loiko, Austin, TX (US);

Jane A. Yater, Austin, TX (US);

Assignee:

NXP USA, Inc., Austin, TX (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/41 (2006.01); H01L 29/423 (2006.01); H01L 29/788 (2006.01); H01L 29/792 (2006.01); H01L 29/66 (2006.01); H01L 21/265 (2006.01); H01L 29/10 (2006.01); H01L 29/08 (2006.01); H01L 21/8239 (2006.01);
U.S. Cl.
CPC ...
H01L 29/42328 (2013.01); H01L 21/26513 (2013.01); H01L 21/26586 (2013.01); H01L 29/0847 (2013.01); H01L 29/1033 (2013.01); H01L 29/42344 (2013.01); H01L 29/66825 (2013.01); H01L 29/66833 (2013.01); H01L 29/788 (2013.01); H01L 29/7881 (2013.01); H01L 29/792 (2013.01); H01L 29/7923 (2013.01);
Abstract

A first doped region extends from a top surface of a substrate to a first depth. An implant into the first doped region forms a second doped region of a second conductivity type. The second doped region extends from the top surface to a second depth that is less than the first depth. A split gate NVM structure has select and control gates over the second doped region. A drain region of the second conductivity type is formed adjacent to the select gate. A source region of the second conductivity type is formed adjacent to the control gate. Angled implants into the second doped region form a third doped region of the first conductivity type under a portion of the select gate and a fourth doped region of the first conductivity type under a portion of the control gate. The drain and source regions adjoin the third and fourth regions.


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