The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 21, 2017
Filed:
Mar. 31, 2015
Hitachi High-technologies Corporation, Tokyo, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
Provided is a charged particle beam device which can specify a position of an initial core with high accuracy even when fine line and space patterns are formed by an SADP in plural times. The charged particle beam device includes a detector () which detects secondary charged particles discharged from a sample () when a charged particle beam is emitted to the sample having a plurality of patterns of line shape, a display unit () which displays image data of a surface of the sample on the basis of a signal of the secondary charged particles, a calculation unit () which calculates an LER value with respect to the plurality of the patterns of line shape from the image data, and a determination unit () which compares the values to determine a position of the initial core.