The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 21, 2017
Filed:
Mar. 26, 2014
Ebara Corporation, Toyko, JP;
Kohtaro Kawamura, Tokyo, JP;
Toyoji Shinohara, Tokyo, JP;
Tetsuro Sugiura, Tokyo, JP;
Hideo Arai, Tokyo, JP;
Toshiharu Nakazawa, Tokyo, JP;
Keiichi Ishikawa, Tokyo, JP;
Seiji Kashiwagi, Tokyo, JP;
Yasuhiko Suzuki, Tokyo, JP;
Takashi Kyotani, Tokyo, JP;
EBARA CORPORATION, Tokyo, JP;
Abstract
A vacuum pump includes a vacuum pump having a discharge port to which an abatement part for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless is attached. The vacuum pump includes a cylindrical member having an exhaust gas introduction port for introducing the exhaust gas to be treated and a gas outlet port for discharging gases which have been treated, a plurality of fuel nozzles provided at a circumferential wall of the cylindrical member for ejecting a fuel, and a plurality of air nozzles provided at the circumferential wall of the cylindrical member for ejecting air so as to form a swirling flow of air along an inner circumferential surface of the circumferential wall. The air nozzles are disposed at a plurality of stages spaced in an axial direction of the cylindrical member.