The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 14, 2017
Filed:
Oct. 02, 2014
Asml Netherlands B.v., Veldhoven, NL;
Jaqueline Borges Nicolau, Veldhoven, NL;
Hannah Noble, Veldhoven, NL;
Johannes Jacobus Matheus Baselmans, Veldhoven, NL;
Bart Smeets, Veldhoven, NL;
Paulus Jacobus Maria Van Adrichem, Veldhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A method of correcting an optical image formed by an optical system, the method including obtaining a map indicative of a polarization dependent property of the optical system across a pupil plane of the optical system for each spatial position in an image plane of the optical system, combining the map indicative of the polarization dependent property of the optical system with a radiation map of the intensity and polarization of an input radiation beam to form an image map, and using the image map to correct an optical image formed by directing the input radiation beam through the optical system.