The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 14, 2017
Filed:
Sep. 27, 2016
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Thomas Schicketanz, Aalen, DE;
Toralf Gruner, Aalen-Hofen, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/54 (2006.01); G02B 17/08 (2006.01); G02B 13/14 (2006.01); G03F 7/20 (2006.01); G03F 1/26 (2012.01);
U.S. Cl.
CPC ...
G02B 17/0892 (2013.01); G02B 13/14 (2013.01); G02B 17/08 (2013.01); G02B 17/0896 (2013.01); G03F 1/26 (2013.01); G03F 7/702 (2013.01); G03F 7/70225 (2013.01); G03F 7/70258 (2013.01); G03F 7/70266 (2013.01); G03F 7/70275 (2013.01); G03F 7/70308 (2013.01); G03F 7/70316 (2013.01); G03F 7/70441 (2013.01);
Abstract
A projection exposure apparatus includes a catadioptric projection objective, an illumination system, a stage, and a control unit. The catadioptric projection objective includes multiple objective parts, and one or more active manipulators coupled to one or more optical elements of the projection objective. The control unit is programmed to cause the one or more active manipulators to act on one or more corresponding optical elements while the stage scans a wafer with respect to an image field to reduce errors in the image at the image field.