The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 31, 2017
Filed:
Nov. 04, 2014
Applicant:
Spts Technologies Limited, Newport, GB;
Inventors:
Assignee:
SPTS TECHNOLOGIES LIMITED, Newport, GB;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/35 (2006.01); C23C 14/00 (2006.01); C23C 14/10 (2006.01); C23C 14/34 (2006.01); C01B 33/12 (2006.01);
U.S. Cl.
CPC ...
C23C 14/0036 (2013.01); C01B 33/12 (2013.01); C23C 14/10 (2013.01); C23C 14/3485 (2013.01); C23C 14/35 (2013.01);
Abstract
According to the invention there is a method of depositing SiOonto a substrate by pulsed DC reactive sputtering which uses a sputtering gas mixture consisting essentially of oxygen and krypton.