The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 24, 2017
Filed:
Feb. 08, 2016
Applicant:
Sandisk Technologies Inc., Plano, TX (US);
Inventors:
Masatoshi Nishikawa, Yokkaichi, JP;
Jin Liu, Milpitas, CA (US);
Chun Ge, Milpitas, CA (US);
Yanli Zhang, San Jose, CA (US);
Assignee:
SANDISK TECHNOLOGIES LLC, Plano, TX (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 27/115 (2017.01); H01L 29/792 (2006.01); H01L 21/28 (2006.01); H01L 27/1157 (2017.01); H01L 27/11582 (2017.01); H01L 27/11573 (2017.01);
U.S. Cl.
CPC ...
H01L 27/1157 (2013.01); H01L 21/28282 (2013.01); H01L 27/11573 (2013.01); H01L 27/11582 (2013.01); H01L 29/7926 (2013.01);
Abstract
A three-dimensional memory device includes an alternating stack of electrically conductive layers and insulating layers located over a substrate, an array of memory stack structures, each memory stack structure extending through the alternating stack and including a memory film and a semiconductor channel laterally surrounded by the memory film, and an array of dielectric pillars located between the alternating stack and the substrate.