The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 24, 2017
Filed:
Aug. 12, 2014
Applicants:
Carl Zeiss Sms Ltd., Karmiel, IL;
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Vladimir Dmitriev, Karmiel, IL;
Ingo Saenger, Heidenheim, DE;
Frank Schlesener, Oberkochen, DE;
Markus Mengel, Heidenheim, DE;
Johannes Ruoff, Aalen, DE;
Assignees:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Carl Zeiss SMS Ltd., Karmiel, IL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/54 (2006.01); G03F 7/20 (2006.01); G02B 27/00 (2006.01); G02B 5/30 (2006.01); G01M 11/02 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70591 (2013.01); G01M 11/0242 (2013.01); G02B 5/3091 (2013.01); G02B 27/0043 (2013.01); G03F 7/70191 (2013.01); G03F 7/70308 (2013.01); G03F 7/70566 (2013.01);
Abstract
The invention relates to a method for compensating at least one defect of an optical system which includes introducing an arrangement of local persistent modifications in at least one optical element of the optical system, which does not have pattern elements on one of its optical surfaces, so that the at least one defect is at least partially compensated.