The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 24, 2017
Filed:
Feb. 20, 2015
Applicant:
Fei Company, Hillsboro, OR (US);
Inventor:
Roger Alvis, Beaverton, OR (US);
Assignee:
FEI Company, Hillsboro, OR (US);
Primary Examiner:
Int. Cl.
CPC ...
G01Q 30/02 (2010.01); G01N 1/00 (2006.01); G01Q 30/20 (2010.01); H01J 37/285 (2006.01); G01N 1/32 (2006.01); G01N 1/28 (2006.01);
U.S. Cl.
CPC ...
G01Q 30/02 (2013.01); G01N 1/00 (2013.01); G01N 1/32 (2013.01); G01Q 30/20 (2013.01); H01J 37/285 (2013.01); G01N 2001/282 (2013.01); H01J 2237/2802 (2013.01); H01J 2237/2852 (2013.01); H01J 2237/31745 (2013.01); H01J 2237/31749 (2013.01); Y10T 428/2933 (2015.01); Y10T 428/2958 (2015.01);
Abstract
A method of forming a sample and performing correlative S/TEM and APM analysis is provided wherein a sample containing a region of interest is cut from a bulk of sample material and formed into an ultra-thin lamella. The lamella is then analyzed with an S/TEM to form an image. The lamella sample and mount may then go through a cleaning process to remove any contamination. The lamella containing the ROI is then embedded within a selected material and is formed into a needle-shaped sample. The needle-shaped sample is then analyzed with the APM and the resulting data is merged and correlated with the S/TEM data.