The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 17, 2017
Filed:
Nov. 30, 2015
L'air Liquide, Société Anonyme Pour L'etude ET L'exploitation Des Procédés Georges Claude, Paris, FR;
Changhee Ko, Tsukuba, JP;
Julien Gatineau, Seoul, KR;
Clément Lansalot-Matras, Princeton, NJ (US);
Julien Lieffrig, Soucy, FR;
Hana Ishii, Tsukuba, JP;
Abstract
Titanium-containing film forming compositions are disclosed as well as methods of synthesizing the same and methods of forming Titanium-containing films on substrates via vapor deposition processes using the Titanium-containing film forming compositions. The Titanium-containing film forming compositions comprise a precursor having the formula Ti(RCp)(L), wherein each R is independently H, an alkyl group, or R'Si, with each R′ independently being H or an alkyl group; L is selected from the group consisting of formamidinates (N-fmd) or amidinates (NR″-amd).