The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 10, 2017
Filed:
Aug. 19, 2013
Asml Netherlands B.v., Veldhoven, NL;
Ruud Antonius Catharina Maria Beerens, Roggel, NL;
Rob Johan Theodoor Rutten, Eindhoven, NL;
Jan Steven Christiaan Westerlaken, Heesch, NL;
Koen Jacobus Johannes Maria Zaal, Eindhoven, NL;
Richard Henricus Adrianus Van Lieshout, Batenburg, NL;
Engelbertus Antonius Fransiscus Van Der Pasch, Oirschot, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A stage system includes a movable stage, and an encoder for measuring a position of the stage, wherein the encoder includes an emitter for emitting an encoder beam, a grating for interacting with the encoder beam, and a detector for detecting the encoder beam having interacted with the grating, the encoder beam in use propagating along an optical path; a purging cap at least partly enclosing the optical path; and a purging medium supply device for supplying a purging medium into the purging cap.