The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 26, 2017
Filed:
May. 05, 2015
Applicant:
Linco Technology Co., Ltd., Taichung, TW;
Inventors:
Chung-Yu Yeh, Taichung, TW;
Huei-Chia Su, Taichung, TW;
Cheng-Peng Yeh, Changhua, TW;
Tsung-Wei Chang, Taichung, TW;
Yi-Yuan Huang, Taichung, TW;
Wan-Yu Huang, Keelung, TW;
Mu-Sen Lu, Taichung, TW;
Assignee:
Linco Technology Co., Ltd., Taichung, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/34 (2006.01); C23C 14/50 (2006.01); H01L 21/673 (2006.01); H01L 21/677 (2006.01); H01J 37/32 (2006.01); C23C 14/54 (2006.01); C23C 14/56 (2006.01); H01J 37/34 (2006.01);
U.S. Cl.
CPC ...
C23C 14/50 (2013.01); C23C 14/541 (2013.01); C23C 14/568 (2013.01); H01J 37/32715 (2013.01); H01L 21/6776 (2013.01); H01L 21/67336 (2013.01); H01L 21/67346 (2013.01); H01J 37/3411 (2013.01);
Abstract
A substrate carrier unit includes a substrate carrier and a phase transition material. The substrate carrier defines an isolated space therein. The phase transition material is filled into the isolated space of the substrate carrier and has a melting point ranging between 18° C. and 95° C. The phase transition material is capable of absorbing thermal energy from the substrate carrier as latent heat to change the phase from solid to liquid.