The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 19, 2017
Filed:
Aug. 08, 2014
Asml Netherlands B.v., Veldhoven, NL;
Martijn Constant Van Beurden, Veldhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A method of calculating electromagnetic scattering properties of a structure, the structure including materials of differing properties and the structure being periodic in at least one lateral direction and extending in a vertical direction, comprises: numerically solving a volume integral equation for electromagnetic scattering for a plurality of modes in the at least one lateral direction, by performing, for each respective mode, integration () of a pseudo-spectral polynomial (Chebyshev) expansion in the vertical direction multiplied by a ID Green's function using the same sample points in the orthogonal direction for all of the plurality of modes. The integration is performed by solving a regularized linear system of equations between first () and second () discrete transformation steps to compute () values of a regularized Chebyshev expansion coefficient vector (γ). Electromagnetic scattering properties of the structure are calculated using the results of the numerical solution.