The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 19, 2017
Filed:
Jun. 17, 2016
Tokyo Ohka Kogyo Co., Ltd., Kawasaki-shi, JP;
Hiroto Yamazaki, Kawasaki, JP;
Yoshitaka Komuro, Kawasaki, JP;
Masatoshi Arai, Kawasaki, JP;
Daisuke Kawana, Kawasaki, JP;
Kenta Suzuki, Kawasaki, JP;
Tatsuya Fujii, Kawasaki, JP;
TOKYO OHKA KOGYO CO., LTD., Kawasaki-Shi, JP;
Abstract
A positive-type resist composition which generates an acid upon exposure and whose solubility in an alkali developing solution increases under the action of an acid, the composition including a base material component whose solubility in an alkali developing solution increases under the action of an acid; and a compound represented by the following general formula (m0): Zto Zeach independently represent a substituent having electron withdrawing properties, Rband Rbeach independently represent an alkyl group, an alicyclic hydrocarbon group which may have a substituent, or a hydroxyl group, Rbrepresents an aryl group which may have a substituent, an alkyl group, or an alkenyl group, n1 and n2 represent an integer of 0 to 3, and X0represents an organic anion.