The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 12, 2017
Filed:
Dec. 21, 2015
Cymer, Llc, San Diego, CA (US);
Asml Netherlands B.v., Veldhoven, NL;
Joshua Jon Thornes, San Deigo, CA (US);
Tanuj Aggarwal, San Diego, CA (US);
Kevin Michael O'Brien, San Diego, CA (US);
Frank Everts, Eindhoven, NL;
Herman Philip Godfried, Amsterdam, NL;
Russell Allen Burdt, San Diego, CA (US);
CYMER, LLC, San Diego, CA (US);
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
Online calibration of laser performance as a function of the repetition rate at which the laser is operated is disclosed. The calibration can be periodic and carried out during a scheduled during a non-exposure period. Various criteria can be used to automatically select the repetition rates that result in reliable in-spec performance. The reliable values of repetition rates are then made available to the scanner as allowed values and the laser/scanner system is then permitted to use those allowed repetition rates.