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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9747682 B1

PDFFull Text
Date of Patent:
Aug. 29, 2017

Filed:

Nov. 13, 2015

Methods for measuring overlays

Applicant:

Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;

Inventors:

Jeongjin Lee, Asan-si, KR;

Chan Hwang, Seoul, KR;

Seungyoon Lee, Seoul, KR;

Assignee:

SAMSUNG ELECTRONICS CO., LTD., Suwon-si, Gyeonggi-Do, KR;

Attorney:

F. Chau & Associates, LLC

Primary Examiner:

Kim Vu

Assistant Examiner:

Molly Delaney

Int. Cl.
CPC ...
G06T 7/00 (2017.01); G03F 7/20 (2006.01); H04N 5/225 (2006.01); H04N 5/33 (2006.01); G06T 7/174 (2017.01);
U.S. Cl.
CPC ...
G06T 7/001 (2013.01); G03F 7/70633 (2013.01); G06T 7/174 (2017.01); H04N 5/2256 (2013.01); H04N 5/332 (2013.01); G06T 2207/10048 (2013.01); G06T 2207/10152 (2013.01); G06T 2207/30148 (2013.01); G06T 2207/30204 (2013.01);
Abstract

A method for measuring overlay includes receiving a first image of a first overlay mark captured using light having a first wavelength. The method includes receiving a second image of a second overlay mark captured using light having a second wavelength different from the first wavelength. The method includes measuring a displacement between a central portion of the first image and a central portion of the second image, wherein the first and second overlay marks are disposed on different levels.

Find Patent Forward Citations

Lee, Jeongjin. (2017). Methods for measuring overlays (U.S. Patent No. 9747682). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9747682

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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