The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 29, 2017
Filed:
May. 27, 2009
Maurits Van Der Schaar, Eindhoven, NL;
Marcus Adrianus Van DE Kerkhof, Helmond, NL;
Sami Musa, Veldhoven, NL;
Maurits Van Der Schaar, Eindhoven, NL;
Marcus Adrianus Van De Kerkhof, Helmond, NL;
Sami Musa, Veldhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
Measurement targets for use on substrates, and overlay targets are presented. The targets include an array of first regions alternating with second regions, wherein the first regions include structures oriented in a first direction and the second regions include structures oriented in a direction different from the first direction. The effective refractive index of the two sets of regions are thereby different when experienced by a polarized beam, which will act as a TM-polarized beam when reflected from the first set of regions, but as a TE-polarized beam when reflected from the second set of regions.