The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 22, 2017
Filed:
Jan. 11, 2016
Globalfoundries Inc., Grand Cayman, KY;
Sunit S. Mahajan, Halfmoon, NY (US);
Parul Dhagat, Halfmoon, NY (US);
Anne C. Friedman, Fishkill, NY (US);
Timothy A. Brunner, Ridgefield, CT (US);
Shahrukh A. Khan, Danbury, CT (US);
GLOBALFOUNDRIES INC., Grand Cayman, KY;
Abstract
A method for preventing buckling in a substrate using a tensile hard mask is provided. The method may include forming a mask over a substrate, the hard mask including a first area having a pattern for forming a plurality of openings and an adjacent second area free of openings, and the hard mask includes a tensile stress therein. The hard mask may be used to form the plurality of openings in the substrate. Partially eroding the hard mask leaves the substrate with the plurality of openings therein and a substantially planar surface, having diminished buckling.