Charged particle beam device enabling facilitated ebsd detector analysis of desired position and control method thereof

Abstract

A charged particle beam device allowing an analysis position in a sample analyzable with an EBSD detector to be acquired beforehand, and allowing a sample to be adjusted to a desired analysis position in a short time. A charged particle beam device is provided with a charged particle source (), a charged particle optical system (), an EBSD detector (), a sample stage (), an image display unit () for displaying a portion of the sample observable with the EBSD detector and a non-observable portion of the sample such that said portions are distinguished from each other, an operation input unit () where a position to be observed by the EBSD detector is entered, and a control unit () for controlling a planar movement, an inclination movement and a rotation movement of the sample stage so as to allow the observation position entered from the operation input unit to be observed with the EBSD detector.