The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 22, 2017
Filed:
May. 16, 2014
Arvind Sundarrajan, San Jose, CA (US);
Jen Sern Lew, Singapore, SG;
Sriskantharajah Thirunavukarasu, Singapore, SG;
Karthik Elumalai, Bangalore, IN;
Arvind Sundarrajan, San Jose, CA (US);
Jen Sern Lew, Singapore, SG;
Sriskantharajah Thirunavukarasu, Singapore, SG;
Karthik Elumalai, Bangalore, IN;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
An electrostatic carrier is described for carrying a substrate for handling through different processes. The carrier has a dielectric plate having a top side and a bottom side and configured to be attached on a top side of the plate to a substrate using electrostatic force, and a base plate coupled to a bottom side of the dielectric plate. Electrodes are formed on the base plate and extend across the base plate parallel to the top side of the dielectric plate. The electrodes are configured to carry an electrostatic charge and formed so that electrodes of a first charge are positioned near electrodes of a second charge. Connectors extend through the base plate to the electrodes to couple the electrodes to a source of electrostatic charge.