The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 22, 2017

Filed:

Feb. 28, 2014
Applicant:

Bruker Nano, Inc., Santa Barbara, CA (US);

Inventors:

Chanmin Su, Ventura, CA (US);

Shuiqing Hu, Santa Barbara, CA (US);

Assignee:

Bruker Nano, Inc., Santa Barbara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01Q 30/06 (2010.01); G01Q 40/00 (2010.01); G01Q 60/34 (2010.01);
U.S. Cl.
CPC ...
G01Q 40/00 (2013.01); G01Q 30/06 (2013.01); G01Q 60/34 (2013.01);
Abstract

A method of compensating for an artifact in data collected using a standard atomic force microscope (AFM) operating in an oscillating mode. The artifact is caused by deflection of the probe not related to actual probe-sample interaction and the method includes compensating for thermal induced bending of the probe of the AFM by measuring a DC component of the measured deflection. The DC component of deflection is identified by calibrating the optical deflection detection apparatus and monitoring movement of the mean deflection, thereby allowing the preferred embodiments to minimize the adverse effect due to the artifact. Notably, plotting the DC deflection profile yields a corresponding temperature profile of the sample.


Find Patent Forward Citations

Loading…