The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 22, 2017
Filed:
May. 22, 2015
Applicants:
Ebara Corporation, Tokyo, JP;
IS Engineering Co., Ltd., Niigata, JP;
Inventors:
Kenya Ito, Tokyo, JP;
Keisuke Uchiyama, Tokyo, JP;
Tomiichi Matsui, Niigata, JP;
Mahito Shibuya, Niigata, JP;
Assignees:
Ebara Corporation, Tokyo, JP;
IS ENGINEERING CO., LTD., Niigata, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C09J 5/00 (2006.01); B65H 37/06 (2006.01); B65H 35/00 (2006.01);
U.S. Cl.
CPC ...
B65H 37/06 (2013.01); B65H 35/0013 (2013.01); C09J 5/00 (2013.01); B65H 2701/11112 (2013.01);
Abstract
A tape sticking apparatus for sticking a masking tape for protecting a peripheral portion of a substrate, such as a wafer, is disclosed. The tape sticking apparatus includes: a substrate holder configured to hold and rotate a substrate; and a tape sticking unit configured to stick a masking tape onto a peripheral portion of the substrate held on the substrate holder.