The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 15, 2017
Filed:
Aug. 06, 2013
Cymer, Llc, San Diego, CA (US);
Alexander I. Ershov, Escondido, CA (US);
Jerzy R. Hoffman, Montebello, CA (US);
Norbert R. Bowering, Bielefeld, DE;
Igor V. Fomenkov, San Diego, CA (US);
ASML Netherlands B.V., Veldhoven, NL;
Abstract
Devices and methods for generating EUV light are disclosed. The device comprises an oscillator having an oscillator cavity length, L, and defining an oscillator path and a multi-pass optical amplifier coupled with the oscillator to establish a combined optical cavity including the oscillator path, the combined cavity having a length, L, where L=(N+x)*L, where 'N' is an integer and 'x' is a number between 0.4 and 0.6. The amplifier comprises a polarization discriminating optic inputting light traveling along a first beam path from the oscillator and having substantially a first linear polarization into the amplifier and outputting light having substantially a linear polarization orthogonal to the first polarization out of the amplifier along a second beam path.