The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 15, 2017
Filed:
Mar. 11, 2015
Applicant:
Nexperia B.v., Eindhoven, NL;
Inventors:
Steven Thomas Peake, Warrington, GB;
Philip Rutter, Stockport, GB;
Assignee:
Nexperia B.V., Eindhoven, NL;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/336 (2006.01); H01L 29/66 (2006.01); H01L 29/78 (2006.01); H01L 29/06 (2006.01); H01L 21/265 (2006.01); H01L 29/423 (2006.01); H01L 29/417 (2006.01); H01L 29/10 (2006.01);
U.S. Cl.
CPC ...
H01L 29/66734 (2013.01); H01L 21/26513 (2013.01); H01L 29/063 (2013.01); H01L 29/0634 (2013.01); H01L 29/66727 (2013.01); H01L 29/7813 (2013.01); H01L 29/0696 (2013.01); H01L 29/1095 (2013.01); H01L 29/41766 (2013.01); H01L 29/42368 (2013.01);
Abstract
A trench-gate device with lateral RESURF pillars has an additional implant beneath the gate trench. The additional implant reduces the effective width of the semiconductor drift region between the RESURF pillars, and this provides additional gate shielding which improves the electrical characteristics of the device.