The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 01, 2017
Filed:
May. 19, 2015
Lam Research Corporation, Fremont, CA (US);
Arthur M. Howald, Livermore, CA (US);
Bradford J. Lyndaker, San Ramon, CA (US);
John C. Valcore, Jr., Fremont, CA (US);
Seyed Jafar Jafarian-Tehrani, Fremont, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
Systems and methods for generating and using characteristics of an impedance matching model with different impedance matching networks are described impedances and/or power efficiencies are measured using a network analyzer or a sensor. The impedances and/or power efficiencies are used to determine the characteristics. With use of different impedance matching networks, the values of the characteristics are changed to achieve same or similar results across different plasma tools for a variety of conditions.