The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 25, 2017
Filed:
Apr. 19, 2012
Vladimir Shlain, Haifa, IL;
Gadi Greenberg, Tel-Aviv, IL;
Idan Kaizerman, Meitar, IL;
Efrat Rozenman, Asseret, IL;
Vladimir Shlain, Haifa, IL;
Gadi Greenberg, Tel-Aviv, IL;
Idan Kaizerman, Meitar, IL;
Efrat Rozenman, Asseret, IL;
Applied Materials Israel Ltd, Rehovot, IL (US);
Abstract
A method for defect classification includes storing, in a computer system, a definition of a region in a feature space. The definition is associated with a class of defects and comprises a kernel function comprising a parameter. The parameter determines a shape of the region. A confidence threshold for automatic classification of at least one defect associated with the class is received. A value of the parameter associated with the confidence threshold is selected. Inspection data for a plurality of defects detected in one or more samples under inspection is received. The plurality of defects for the class are automatically classified using the kernel function and the selected value of the parameter.