The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 18, 2017
Filed:
Mar. 22, 2016
Applicant:
SK Hynix Inc., Gyeonggi-do, KR;
Inventors:
Assignee:
SK Hynix Inc., Gyeonggi-do, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 27/11568 (2017.01); H01L 27/11582 (2017.01); H01L 21/28 (2006.01);
U.S. Cl.
CPC ...
H01L 27/11568 (2013.01); H01L 21/28282 (2013.01); H01L 27/11582 (2013.01);
Abstract
The semiconductor device may include a first sub-pipe gate having a pipe hole formed therein; a second sub-pipe gate disposed on the first sub-pipe gate and passed-through by vertical holes being coupled to the pipe hole, wherein a material of the second sub-pipe gate has a lower oxidation rate than that of a material of the first sub-pipe gate; a first oxidized layer formed within a portion of the first sub-pipe gate to conform to a contour of the pipe hole; and a second oxidized layer formed within a portion of the second sub-pipe gate to conform to a contour of the vertical holes and the contour of the pipe hole.