The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 18, 2017
Filed:
Feb. 23, 2015
Applicant:
Ebara Corporation, Tokyo, JP;
Inventors:
Junichiro Tsujino, Tokyo, JP;
Tsutomu Nakada, Tokyo, JP;
Yusuke Tamari, Sacramento, CA (US);
Mitsutoshi Yahagi, Tokyo, JP;
Akira Owatari, Sacramento, CA (US);
Assignee:
Ebara Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C25C 7/02 (2006.01); C25C 7/00 (2006.01); C25C 3/16 (2006.01); C25C 3/12 (2006.01); C25B 9/00 (2006.01); C25B 9/02 (2006.01); C25D 17/12 (2006.01); C25D 17/00 (2006.01);
U.S. Cl.
CPC ...
C25D 17/12 (2013.01); C25D 17/001 (2013.01); C25D 17/007 (2013.01);
Abstract
An anode unit capable of forming a metal film having a uniform thickness on a substrate is disclosed. The anode unit includes an anode, a first feeding portion connected to a central portion of the anode, a second feeding portion located on a central axis of the anode and located away from the anode, and arms extending radially from the second feeding portion. The arms are connected to a periphery of the anode.