The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 18, 2017

Filed:

Jun. 26, 2014
Applicant:

Beneq Oy, Espoo, FI;

Inventors:

Tapani Alasaarela, Helsinki, FI;

Pekka Soininen, Helsinki, FI;

Assignee:

BENEQ OY, Espoo, FI;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); C23C 16/04 (2006.01); C23C 16/54 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45563 (2013.01); C23C 16/04 (2013.01); C23C 16/45551 (2013.01); C23C 16/545 (2013.01);
Abstract

Methods for providing one or more coating layers on a surface of a substrate by successive surface reactions of at least a first and second precursor are provided. The methods generally include supplying the first precursor from a first precursor nozzle and the second precursor from a second precursor nozzle to the surface of the substrate, and moving the substrate relative to at least one of the first and second precursor nozzle. The methods can further include subjecting only one or more first limited sub-areas of the surface of the substrate to the first and second precursor by cooperation of supplying the first and second precursor and simultaneously moving the substrate relative to at least one of the first and second precursor nozzle.


Find Patent Forward Citations

Alasaarela, Tapani. (2017). Atomic layer deposition method for coating a substrate surface using successive surface reactions with multiple precursors (U.S. Patent No. 9708710). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9708710

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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