The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 18, 2017
Filed:
Oct. 19, 2011
Applicants:
Shinichi Ogata, Tokyo, JP;
Ryuichi Tanimoto, Tokyo, JP;
Keiichi Takanashi, Tokyo, JP;
Inventors:
Assignee:
SUMCO Corporation, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B24B 37/005 (2012.01); B24B 37/015 (2012.01); B24B 37/08 (2012.01); B24B 37/14 (2012.01); B24B 49/14 (2006.01);
U.S. Cl.
CPC ...
B24B 37/005 (2013.01); B24B 37/015 (2013.01); B24B 37/08 (2013.01); B24B 49/14 (2013.01);
Abstract
In a polishing method of the present invention, the temperature of a carrier plate is measured, and the amount of polishing removal of a workpiece (workpiece) is accurately controlled based on change in the measured temperature of the carrier plate.